Shane AO Electronics
Shane AO MEMS Stage, 
EL-3824
Schematic: schematics\AO_mems_sh_1.pdf
Page last updated: November 20, 2012
Simplified Diagram - Refer to first page of schematic for more details
The Shane Adaptive Optics Microelectromechanical System (MEMS) sensor is attached to a New Focus Picomotor five degree-of-motion stage. The MEMS sensor
Sheet 2 
SAO_mems_sh_2.pdf
Simplified Diagram - Refer to second page of schematic for more details
Theta-X and Theta-Y Motions
The above drawing is provided.