Grating Translation Stage / PRM Truth Table

 

 

 

Trans. Enable

PRM Enable

JG4 #4

JG5 #4

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0

0

0

0

0   (1)

0

0

0

1

0   (2)

0

0

1

0

0   (3)

0

0

1

1

1

0

1

0

0

0   (4)

0

1

0

1

0   (5)

0

1

1

0

1

0

1

1

1

1

1

0

0

0

0   (6)

1

0

0

1

1

1

0

1

0

0   (7)

1

0

1

1

1

1

1

0

0

1

1

1

0

1

1

1

1

1

0

1

1

1

1

1

1

                       

 

Notes:

 

  1. Both fiducials enabled, edges on Translation and PRM located.
  2. Both fiducials enabled, edge on Translation located.
  3. Both fiducials enabled, edge on PRM located.
  4. Translation fiducial enabled, edge on Translation located.
  5. Translation fiducial enabled, edge on Translation located.
  6. PRM fiducial enabled, edge on PRM located.
  7. PRM fiducial enabled, edge on PRM located.